No, the value should be the WebPage dedicated to the Article. Both items would typically have the same url, but possibly different @id values (see URL of page vs. post).
{
"@context": "http://schema.org",
"@type": "Article",
"@id": "/articles/42#this",
"url": "/articles/42",
"mainEntityOfPage": {
"@type": "ItemPage",
"@id": "/articles/42",
"url": "/articles/42"
}
}
It might become clearer when looking at the inverse property mainEntity. You would have a WebPage for the current page and provide the mainEntity property to convey what the primary entity on this page is:
{
"@context": "http://schema.org",
"@type": "ItemPage",
"mainEntity": {
"@type": "Article"
}
}
When using mainEntityOfPage instead of mainEntity, you simply switch subject and object.